目錄
Unit 1 A Brief Introduce to Microelectronic Technology
1.1 History About Microelectronics
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1.2 Introduction To Some Courses
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1.3 Reading Materials
1.4 Unit Exercises
Unit 2 Semiconductor Device
2.1 Semiconductor Diode
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2.2 Transistors
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2.3 Microwave and Photonic devices
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2.4 Reading Materials
2.5 Unit Exercises
Unit 3 Micro-electronic Technology
3.1 Crystal Growth
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3.2 Film Growth
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3.3 Photolithography
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3.4 Oxide Growth
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3.5 Diffusion and Ion Implantation
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3.6 Etching
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3.7 Reading Material
3.8 Unit Exercises
Unit 4 Integrated Circuits
4.1 Introduction of Integrated Circuits
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4.2 Integrated circuit design and verification
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4.3 Introduction of Cadence Tools
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4.4 Reading Materials
4.5 Unit Exercises
Unit 5 Microelectronic Mechanical Systems (MEMS)
5.1 Introduction to MEMS
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5.2 Materials for MEMS
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5.3 Processes for Micromachining
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5.4 Reading Materials
5.5 Unit Exercises
Unit 6 Scientific and Technological Papers
6.1 Film Thickness Tester
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