Chapter 1 Project Overview 1.1 Project Introduction 1.1.1 Overall Scientific Objectives 1.1.2 Core Scientific Issues 1.2 Project Layout 1.2.1 Project Deployment 1.2.2 Project Integration and Sublimation 1.2.3 Interdisciplinary and Integration 1.3 Research Significance Chapter 2 Research Situation 2.1 Research Status of Nanomanufacturing 2.2 National Strategic Demand and Development Trend of Nanometer Manufacturing 2.3 Development Trend of Nanomanufacturing in China 2.3.1 Development Trend of Research on Nanomanufacturing in China 2.3.2 Development Trend of Key Technologies of Nanomanufacturing in China 2.3.3 Promotion of the Project to Nanomanufacturing in China Chapter 3 Nano/Sub-Nanometer Precision Manufacturing 3.1 Theoretical Model and Method of Atomic Layer Material Removal 3.2 Important Engineering Application of Nanometer Precision Manufacturing 3.3 Process Equipment for Nanometer Precision Manufacturing Chapter 4 Consistent Manufacturing of Macro, Micro and Nano Cross-Scale Structures 4.1 Principle and Method of Electric Field Driven Nanoimprint 4.1.1 Near-Zero Pressure Filling Principle of Electric Field Regulation at Liquid-Solid Interface 4.1.2 Micro-Shape-Control Method for Multi-Physical Field Cooperative Control 4.1.3 Forming Control Mechanism Driven by Electric Field of Micro-Nano Structure 4.2 Principles and Methods of Electrochemical Nanoimprinting of Semiconductor Materials 4.2.1 Principle and Method of Electrochemical Corrosion Induced by Contact Potential 4.2.2 Principle and Method of Cooperative Modulation of Electric Field, Light Field and Force Field for Electrochemical Imprinting 4.3 Imprinting Manufacturing Equipment for Large-Format Nanoscale Structures 4.3.1 Roll-to-Roll Continuous Roll Imprint Equipment 4.3.2 Wafer-Level Gas-Electricity Cooperative Nanoimprint Equipment 4.4 Engineering Applications of Functionalized Large Area Nanostructures 4.4.1 Ultra-Long Metrological Grating and Its Engineering Application 4.4.2 Special-Shaped Micro-Nano Structure and Its Engineering Application 4.4.3 Ultra-Thin Light Guide Plate and Its Engineering Application 4.4.4 Flexible Transparent Conductive Film and Its Engineering Application Chapter 5 Cross-Scale Integrated Manufacturing of Nanostructures and Devices 5.1 High Precision Controllable Manufacturing of Self-Constrained Nanomachining 5.2 Manufacturing of Three-Dimensional Micro-Nano Structure Induced by External Field 5.3 On-Demand Regional Architecture of Functional Nanostructures 5.4 Controlled Machining Method of Two-Dimensional Material Nanostructures 5.5 Important Engineering Applications of Cross-Scale Manufacturing Chapter 6 New Methods of Laser Micro-Nanomanufacturing 6.1 New Principle and Method of Ultra-Fast Laser Space-Time Shaping Micro-N 6.3.5 Manufacturing of Nanocrystalline Large-Area Assembly Structure 6.4 Laser Micro-Nanomanufacturing Equipment Chapter 7 Other Nanomanufacturing Principles and Technological Breakthroughs 7.1 Preparation and Application of Functional Nanomaterials/Structures 7.1.1 Preparation of Functional Nanomaterials/Structures 7.1.2 Nano-Material Hybrid Printing Technology and Application 7.2 Maskless Manufacturing of Nanostructures 7.2.1 Nano Cutting Mechanism and Ion Implantation Auxiliary Processing 7.2.2 Rotary Near-Field Lithography of Nanostructures 7.2.3 Masidess Etching Fabrication of Nanocones 7.2.4 Principles and Methods of Constrained Etching for Nano-Features 7.2.5 Multi-Photon Fabrication of Metal Micro-Nano Structures 7.3 New Nano Device Manufacturing 7.3.1 Principle and Manufacturing of Two-Dimensional Material Devices 7.3.2 Cross-Scale 3D Interconnection and Integrated Manufacturing of Nanostructures and Devices 7.4 Precision Measurement and Traceability in Nanomanufacturing 7.4.1 Nano/Sub-Nano Error Transmission and Traceability 7.4.2 Nanomaterials and Nanostructure Detection and Characterization Chapter 8 Outlook 8.1 The Shortcomings and Strategic Needs of Chinas Nanomanufacturing 8.1.1 The Shortcomings of Chinas Nanomanufacturing 8.1.2 The Development Strategy of Chinas Nanomanufacturing 8.2 Ideas and Suggestions for Continuous Research on Nanomanufacturing 8.2.1 Assumptions of Continuous Research on Nanomanufacturing 8.2.2 Suggestions for Continuous Research on Nanomanufacturing References
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